CN EN

SINO Plasma 200 UV curing machine

 
PRODUCT INTRODUCTION
SINO-Plasma 200 UV curing machine is a single chamber equipment independently developed by AMTE. It is equipped with high-precision transmission mechanical arm and temperature control module. The operating system is self-developed by AMTE with Windows as operation platform with large LCD touch panel, simple and convenient interface. The equipment has the advantages of small space occupation, low consumables and operating costs. It is suitable for UV curing process of semiconductor process line.

APPLICATIONS
· 4-8 inch silicon based semiconductor production line
· Application of UV curing in 4-6 inch SiC, GaN and GaAs production lines

ADVANTAGES
· High precision transmission platform
· Excellent programming design, location interlocking and product protection
· Visual operation interface with large touch screen
· Precise temperature control
· Low consumption and maintenance cost of reaction chamber
· Can provide a variety of new process development and solutions 

TECHNICAL PARAMETERS
Equipment Availability / Uptime: ≥95
WPH: >80
Heater Temperature Control: ±2°C of setpoint
Irradiation intensity: 275+-45 MW/ CM²、105+-30 MW /CM²



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