Gasonics series V1.0
Gasonics degumming series （A1000,A2000,L3510,PEP3510）
Gasonics series equipment is suitable for 4, 6, 8 inch plasma stripping process. Microwave power source is adopted, and the plasma stripping rate is fast, among which A1000, A2000, L3510 are single chamber design, PEP3510 is dual chamber design. The equipment occupies a small space and is suitable for large-scale production.It has simple operation interface, convenient maintenance, high rate of machine utilization, and highly cost effective. The most suitable model can be selected according to the process requirements and budget. Its market share is high and the strong spare parts channel is AMTE’s strength.
4'' , 6'' and 8'' traditional silicon-based semiconductor production line.
APPLICATIONS AFTER UPGRADE
4'' , 6'' SiC, GaN, GaAs process line
ADVANTAGES AFTER UPGRADE
· Customized the solutions of low-temperature plasma stripping
· Optional customized transmission system to increase the stability of the machine
· Up to 4 pipelines of process gas can be chosen, customized stubborn photoresist removal scheme
· Upgrade the transfer and chamber kit to match the transfer and matching process of transparent film and thin wafer
· Provide a variety of new process development and solutions