SINO Plasma/2000/6000/7000PECVD
• Product process application types include α- Si, SiO2, SixNy, PSG, BPSG, etc.
• It is applied to Si based processes, compounds, MEMS fields, filters, optical communications, micro displays, optical micro processing and other fields.
• Different types of transmission platforms and cavity models can be flexibly configured according to the product requirements of users (multi chip and single chip cavities are available), which is suitable for different application needs of colleges, research and development lines, pilot lines, and large-scale production lines.
• Different process configuration items can be provided according to the user's application scenarios, so as to meet the customer's requirements for different refractive indexes and different stresses.
• Low operating costs.