Process application
Waterproof vapor protective layer, optical coating, functional film (hydrophilic layer, hydrophobic layer)

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Wafer size
8 inches and below

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Sedimentary materials
Al2O3、TiO2、SiO2、HfO2、ZrO2、AlN、TiN  et al

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Application area
Mini LED, Micro LED, UVC LED and vehicle outdoor lighting LED, optical lens (need to be laminated), AR grating, MEMS sensor, SAW&BAW filter.